FACTS² DF2400 C-SAM Acoustic Microscope

Delivering high throughput with minimal operator interaction, FACTS² simultaneously inspects two trays or modules with precision of ± 0.5 microns and utilizes multiple scan heads, improving throughput between two and seven times that of previous tools.

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SECS-II / GEM (SEMI E30) and SMEMA compliant.
Non-immersion scanning using Sonoscan’s WaterFall or WaterPlume transducers, minimizing risks of contamination, fluid ingression and movement due to floating of parts.
Automated Data Analysis Package allows you to pre-define Accept/Reject criteria and automatically indicates rejected parts within the data image or file.
Vacuum Hold Down option to stabilize small parts in place during scan to ensure the highest quality images.
Separate drying chamber with up to four oscillating air knives and optional heat to quickly and efficiently dry parts after scanning.
Doubles as a full feature analytical tool.
Incredible throughput achieved with optional independent second scanner.
Numerous configuration options including JEDEC trays, Auer Boat and IGBT modules.

Sonoscan FACTS DF2400 C‑SAM Catalog