1936MK5-F

  • Auto-refill formic bubbler system designed for continuous process support
  • Formic exhaust abatement unit for cleaner operation
  • Real-time monitoring of formic acid concentration and O₂ ppm levels ensures stable processing
  • Enhanced safety with formic acid and carbon monoxide detection sensors
  • Fully SEMI S2/S8 compliant for manufacturing safety standards
Fluxless/Formic Reflow Ovens

Heller has engineered a production-ready horizontal Flux-Free Formic Reflow oven designed specifically for formic acid vapor soldering, meeting SEMI S2/S8 safety requirements, including toxic gas compliance.

In our Formic Reflow Process, the system functions like a standard reflow oven, with formic acid vapor injected into key thermal zones (typically soak zones). The vapor removes metal oxides before reflow, while real-time monitored bubbler control maintains stable formic concentration.

The Formic Acid Precision Bubbler Cabinet provides consistent vapor concentration within ±0.5%, ensuring a stable process environment. Concentration is based on nitrogen saturation behavior modeled by the Antoine equation and can be adjusted via bubbler temperature and nitrogen flow.
An auto-refill system maintains bubbler volume above minimum levels at all times.

The proprietary Heller Formic Gate significantly reduces gas consumption. This double-door configuration at the oven entrance and exit ensures only one door opens at a time, isolating the process chamber and reducing nitrogen and formic usage during continuous production.

Key advantages of formic reflow include:
Key advantages of formic reflow include:

✔ High-volume manufacturing capability – Formic reflow ovens support true in-line continuous processing, similar to standard reflow equipment, achieving maximum throughput over batch-type systems.
✔ Low consumable usage – A unique Formic Gate system acts as a double-door structure at the oven entrance and exit, minimizing nitrogen and formic acid consumption while maintaining strong productivity.
✔ Vacuum process option – To support growing demand for void-free interconnects, an optional vacuum chamber can be integrated into the reflow zone.
✔ Advanced safety integration – Systems comply fully with SEMI S2/S8 requirements, including advanced monitoring and abatement features.
✔ Cleanroom compatibility up to Class 100 – Multiple configurations support cleanroom integration up to Class 100.
✔ Real-time formic acid tracking – Continuous monitoring and recording ensure reliable and consistent process control.
✔ Industry leadership – Heller Industries pioneered flux-free formic reflow and introduced the first continuous in-line formic reflow systems to the market.

Technical Features of 1936MK5-F
Feature 1936MK5-F
Oven Length 590cm
Heated Zones 10 Top / 10 Bottom
Total Heated Length 348 cm
Cool Zones 3 Top (Bottom Option)
Max Working Temperature Standard: 350°C Option: 400°C
Cleanroom Option Down to Class 1000
Formic Acid Stability in Soak Zone +/- 1%
Product Brochure of 1936MK5-F Series

Download the product brochure of 1936MK5-F Series to learn about its key features, technical structure, and application areas