The AW Series wafer inspection system offers better than 5 micron sensitivity and throughput up to 2x faster than competing systems. With non-immersion Waterfall transducers, it eliminates false positives caused by DI water, ensuring accurate and reliable wafer inspection.

The AW Series automated wafer inspection system automatically handles, inspects, and sorts wafers using user-defined accept/reject criteria. It supports wafer-level products such as BSI sensors, SOI, MEMS, LEDs, Chip-on-Wafer, and unpolished wafers, regardless of bonding process (fusion, anodic, glass frit, epoxy).