ATHENA Series

Advanced and precise 3D inspection technology

Stable 3D imaging performance with additional projectors

✔ Accurate 3D chip formation in dense and narrow areas
✔ Realistic 3D imaging identical to real structures

Enhanced repeatability for consistent inspection result

✔ Reliable 3D inspection ensures repeat accuracy

Dual 2D/3D simultaneous inspection algorithm

Telecentric lens provides superior accuracy & detection capability

High-speed CPU and advanced image processing

Intuitive user-friendly interface

Integrated library management system

Real-time offline debug station

Optional 4-way side cameras