AMI SpinSAM
✓ Industry-leading throughput for four 300mm wafer inspections
✓ Best-in-class footprint and UPH efficiency
✓ Superior defect capture accuracy and high image quality
✓ Modular system design for simplified serviceability
✓ Fully automated inspection and analysis with seamless factory communication
| Feature | AMI SpinSAM |
|---|---|
| 200 μm Pixel Pitch | 95 WPH |
| 100 μm Pixel Pitch | 41 WPH |
| 50 μm Pixel Pitch | 12 WPH |
| 25 μm Pixel Pitch | 3 WPH |
| Feature | AMI SpinSAM |
|---|---|
| H050/050 | 12.7 mm Focal Length F2 50 MHz |
| H115/050 | 12.7 mm Focal Length F2 115MHz |
| H230/025 | 6.4mm Focal Length F4 230MHz |
| H230/0375 | 9.5 mm Focal Length F2 230MHz |
| Customized transducers | For specific applications available upon request |
| Feature | AMI SpinSAM |
|---|---|
| Warpage | Create clear and focused images with built in handling of warped wafers +/- 1.5mm warpage. |
| OCR wafer reader | Read and report laser scribed wafer ID |
| 200mm | System configured to handle 200mm wafers |
| Feature | AMI SpinSAM |
|---|---|
| Footprint | 2750 W x 2230 D x 2240 H mm |
| System Weight | Scanner 1700 kg (3747 lbs) EFEM 900kg (1984 lbs) Total weight 2900 kg (6363 lbs) |
| Power Supply | 200-240 VAC, 50/60 Hz, 100A Three Phase 4 or 5 wire |
| Typical Power Consumption | Full Load Amps – 50A |
| Air Supply | CDA 0.62-0.90 MPa Peak 900 L/Min @ 1000kPa |
| CDA typical | 900 lpm @ 650kPa |
| DI Water | Temperature: 10-50°C / Resistivity minimum: 5MΩ-cm / Pressure: 0-10-0.50 MPa / Flow 6 L/Min |
| Water DI typical | Single use 4 lpm; Recirculated 1lph |
| Process Chilled Water | Temperature: 2 -18°C / Pressure 0.10 - 050MPa / Flow 2-8 L/Min |
| PCW typical | 4 lpm Recirculated only |
| Recirculate Water | Switch from single use water to recirculate and reduce water usage and maintain critical temperatures using an inline water purification and filtration system. |
| Operating Environment | 15 -30°C Humidity <85% (non-condensing) |
| Operating System | Windows 11 64-bit |
| Standard Warpage Handling | +/- 1mm |
| PCW typical | 4 lpm Recirculated only |
This product video introduces AMI SpinSAM by summarizing its general working principle and typical application scenarios.
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