Quadra 7 Pro

Quadra 7 Pro

High Accuracy. High Resolution. High Speed.
Inspection & Metrology Equipment.

Quadra 7 Pro

The Complete X-ray Inspection Solution

✔ Quadra Pro series produces unmatched ultra high definition images. The internally developed, high-efficiency Dual Mode NT4 X-ray tube and the Onyx detector deliver clarity of even the smallest details and detect defects instantly.

✔ The Quadra™ 7 Pro establishes a new benchmark for 3D/2D manual inspection with enhanced resolution for back-end semiconductor processes. Integrated with the groundbreaking Onyx detector technology, it ensures outstanding image sharpness and minimized noise levels, raising the inspection process to the highest degree of precision and performance.

✔ The Quadra 7 Pro features the latest Dual Mode Quadra NT4 tube, delivering users maximum adaptability. This advanced option provides brightness and resolution settings, enabling operators to seamlessly alternate between them according to specific application needs.

✔ Along with its advanced hardware, the Quadra 7 Pro includes the newly introduced Revalution™ software. Developed particularly for advanced semiconductor use, Revalution™ software improves the user experience with a user-friendly interface, streamlined workflow, and extended capabilities. It allows operators to quickly evaluate and understand inspection data, supporting faster decisions and greater overall efficiency.

Onyx Gadox Detector
Feature QUADRA 7Pro
Resolution 25 fps
Frame Rate 25 fps
Effective Pixel Size 50 μm
Active Area (mmˆ2) 16000
Quadra NT X-ray Tube
Feature QUADRA 7Pro
Type Mk4 Dual Mode 20W
Feature Recognition <100nm
Max. Power 20 W
JIMA 0.5 μm (across 0.5W to 20W power range)
Voltage 30-160kv
Inspection
Feature QUADRA 7Pro
Oblique Angle View 2 × 70° - No sample rotation required
Anti Vibration Active
Inspection Area 510 x 445 mm (20 x 17.5”)
Geometric Magnification x750 + Digital zoom (with options)
Image bit depth 16-bit
Display 40” Ultra Wide Monitor (5120 x 2160)
System
Feature QUADRA 7Pro
Footprint 1570 W x 1500 D x 1900 H mm
System Weight 1950 kg (4300 lbs)
Power Supply Single phase 200-230 VAC, 50/60 Hz, 16A
Typical Power Consumption 1kW
Air Supply 5-8 bar clean, dry for anti-vibration
Operation Temperature 10-30°C
Humidity <85 % (non-condensing)
Operation Mouse point and click
Software Revalution
Operating System Windows 10 64-bit
X-ray Safety <1 μSv/hr Meets all international standards
Options
Feature QUADRA 7Pro
X-Plane View sample slices without additional CT hardware
μCT Track samples easily
Barcode Reader Track samples easily
Joystick USB Joystick Module
Filtering Tray Reduce sample X-ray dose
Wafer Holders For handling 300 mm and 200 mm wafers
Product Brochure of Quadra 7 Pro

Download the product brochure of Quadra 7 Pro to learn about its key features, technical structure and application area

Product Video
Quadra 7 Pro

This product video introduces Quadra 7 Pro by summarizing its general working principle and typical application scenarios.

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