The AW series can deliver better than 5 micron sensitivity, throughputs that are approximately two times faster than competitive systems and non­‑immersion scanners that eliminate false positives due to DI water ingression.

The AW Series takes advantage of Sonoscan’s proprietary high acoustic frequency lenses, which are designed in-house, to obtain the most detailed images. Special lenses are required since the materials used in these applications, such as Silicon, Sapphire, Glass, GaAs, etc., can be very transparent to ultrasound. Delamination with the separation between the wafers as thin as 200Å Angstroms can be detected.

The AW300 Series delivers fully automated inspection, is SECS/GEM compliant and can be customized to your requirements.